The Zeiss Ultra 55 scanning electron microscope equipped with a field emission gun is our "working horse" in solving structural and analytical questions on a microscopic scale.
Four different electron detectors are available for image recording:
- Conventional secondary electron detector for topographic contrast, atomic ("z"-) contrast (in case of light and intermediate elements) and orientation contrast
- In-lens secondary electron detector for better z-contrast by suppression of topographic contrasts
- Backscatter detector for distinct z-contrast, especially in case of intermediate and heavy elements
- In-lens back scatter detector for z-contrast even at low acceleration voltages
The scanning electron microscope is equipped with an EDX system which allows quantification of elements with z>4 (Be). Microscope control by means of the EDX software enables semi-automatic long-term analyses (e.g. serial analyses or high resolution mappings). Additionally, an EBSD system for identifying the phases present due to crystallographic properties is installed.
- Schottky field emission gun
- Resolution 1 nm at 15 keV, 1.7 nm at 1.7 keV and even 4 nm at 0.1 keV acceleration voltage
- Secondary electron detector, angle selective BSE-Detector (ASB-Detector)
- In-lens SE-Detector and In-lens BSE-Detector
- Oxford INCA EDX- System
- Oxford Channel5 / Nordlys II EBSD-System.