The cross-sectional department Integration of Micro- and Nanosystems of the Institute of Quantum Technologies works in an interdisciplinary way and provides technologies as well as processes for quantum-based micro- and nanosystems, which then function reliably under space conditions. The fabrication and assembly processes of the department are largely carried out under clean room conditions.
The focus lies on a high level of system integration, so that miniaturized, compact, and efficient functional demonstrators up to prototypes can be created. For the functionality of the system, technological boundary conditions for the requirements are first defined and then solution strategies for overcoming them are developed. Synergy effects are achieved through the close collaboration of the departments of the institute.
Current Research Topics